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1

Thermal characterisation of a direction dependent flow sensor

P. Fürjes, G. Légrádi, Cs. Dücső, A. Aszódi, I. Bársony

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 391 KB

english, 2004

2

Thermal investigation of micro-filament heaters

P. Fürjes, Zs. Vizváry, M. Ádám, A. Morrissey, Cs. Dücső, I. Bársony

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 238 KB

english, 2002

3

The Role of Phase Changes in TiO2/Pt/TiO2 Filaments

Bíró, Ferenc, Hajnal, Zoltán, Dücső, Csaba, Bársony, István

Journal:

Journal of Electronic Materials

Year:

2018

Language:

english

File:

PDF, 1.88 MB

english, 2018

4

Three-dimensional force sensor by novel alkaline etching technique

É. Vázsonyi, M. Ádám, Cs. Dücső, Z. Vízváry, A.L. Tóth, I. Bársony

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 470 KB

english, 2005

5

Effects of the elastic cover on tactile sensor arrays

Gábor Vásárhelyi, Mária Ádám, Éva Vázsonyi, István Bársony, Csaba Dücső

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 1.18 MB

english, 2006

6

CMOS integrated tactile sensor array by porous Si bulk micromachining

Mária Ádám, Tibor Mohácsy, Péter Jónás, Csaba Dücső, Éva Vázsonyi, István Bársony

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 759 KB

english, 2008

7

Olfactory detection of methane, propane, butane and hexane using conventional transmitter norms

S. Kulinyi, D. Brandszájsz, H. Amine, M. Ádám, P. Fürjes, I. Bársony, Cs. Dücső

Journal:

Sensors and Actuators B: Chemical

Year:

2005

Language:

english

File:

PDF, 525 KB

english, 2005

8

Porous silicon bulk micromachining for thermally isolated membrane formation

Cs Dücsö, É Vázsonyi, M Ádám, I Szabó, I Bársony, J.G.E Gardeniers, A van den Berg

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 836 KB

english, 1997

9

Microwave plasma CVD diamond layers on three-dimensional structured Si for protective coating

Csorbai, H., Kováts, A., Kátai, S., Hárs, G., Dücsō̄, C., Kálmán, E., Deák, P.

Journal:

Diamond and Related Materials

Year:

2002

Language:

english

File:

PDF, 1.03 MB

english, 2002

10

[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Sacrificial Deuterium Passivation for Improved Interface Engineering in Gate Stack Processing

Pap, Andrea Edit, Battistig, Gabor, Ducso, Csaba, Barsony, Istvan, Kamaras, Katalin, Nenyei, Zsolt, Dietl, Waltraud, Kirchner, Christoph

Year:

2007

Language:

english

File:

PDF, 1.38 MB

english, 2007

11

Characterization of an Integrable Single-Crystalline 3-D Tactile Sensor

Vasarhelyi, G., Adam, M., Vazsonyi, E., Vizvary, Z., Kis, A., Barsony, I., Ducso, C.

Journal:

IEEE Sensors Journal

Year:

2006

Language:

english

File:

PDF, 577 KB

english, 2006

12

Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors

Csorbai, Hajnalka, Fürjes, P., Hárs, G., Dücső, Csaba, Bársony, István, Kálmán, Erika, Deák, Peter

Journal:

Materials Science Forum

Year:

2003

Language:

english

File:

PDF, 1.04 MB

english, 2003

13

[IEEE 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Budapest, Hungary (2016.5.30-2016.6.2)] 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - 3D force sensors for laparoscopic surgery tool

Rado, Janos, Ducso, Csaba, Battistig, Gabor, Szebenyi, Gabor, Szebenyi, Gabor, Furjes, Peter, Nawrat, Zbigniew, Rohr, Kamil

Year:

2016

Language:

english

File:

PDF, 4.24 MB

english, 2016

14

Force Feedback Control System Dedicated for Robin Heart Surgical Robot

Nawrat, Zbigniew, Rohr, Kamil, Fürjes, Péter, Mucha, Lukasz, Lis, Krzysztof, Radó, János, Dücső, Csaba, Földesy, Péter, Sadowski, Wojciech, Krawczyk, Dariusz, Kroczek, Piotr, Szebényi, Gábor, Soós, Pá

Journal:

Procedia Engineering

Year:

2016

Language:

english

File:

PDF, 688 KB

english, 2016

15

The critical impact of temperature gradients on Pt filament failure

Bíró, Ferenc, Hajnal, Zoltán, Dücső, Csaba, Bársony, István

Journal:

Microelectronics Reliability

Year:

2017

Language:

english

File:

PDF, 2.48 MB

english, 2017

16

[IEEE 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - ROMA, Italy (2018.5.22-2018.5.25)] 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Force sensitive smart laparoscope of ROBIN HEART surgical robot

Rado, Janos, Ducso, Csaba, Foldesy, Peter, Szebenyi, Gabor, Santha, Hunor, Rohr, Kamil, Mucha, Lukasz, Lis, Krzysztof, Sadowski, Wojciech, Krawczyk, Dariusz, Kroczek, Piotr, Malota, Zbigniew, Nawrat,

Year:

2018

Language:

english

File:

PDF, 592 KB

english, 2018

17

Determination of Deformation Induced by Thin Film Residual Stress in Structures of Millimeter Size

I.E. Lukács, Z. Vízváry, P. Fürjes, F. Riesz, C. Dücsö, I. Bársony

Journal:

Advanced Engineering Materials

Year:

2002

Language:

english

File:

PDF, 163 KB

english, 2002

18

Concept for processing of silicon check valves by proton beam micromachining

Cs. Dücso˝, I. Rajta, P. Fürjes, E. Baradács

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2007

Language:

english

File:

PDF, 800 KB

english, 2007

19

Si micro-turbine by proton beam writing and porous silicon micromachining

I. Rajta, S.Z. Szilasi, P. Fürjes, Z. Fekete, Cs. Dücső

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2009

Language:

english

File:

PDF, 342 KB

english, 2009

20

Effects of galactomannan as carbon source on production of α-galactosidase by Thermomyces lanuginosus: Fermentation, purification and partial characterisation

Lilla Svastits-Dücső, Quang D. Nguyen, Dominika Dóra Lefler, Judit M. Rezessy-Szabó

Journal:

Enzyme and Microbial Technology

Year:

2009

Language:

english

File:

PDF, 359 KB

english, 2009

21

Micro-hotplates for thermal characterisation of structural materials of MEMS

P. Csíkvári, P. Fürjes, Cs. Dücső, I. Bársony

Journal:

Microelectronics Journal

Year:

2009

Language:

english

File:

PDF, 359 KB

english, 2009

22

Structural and electronic properties of Si/SiO2 MOS structures with aligned 3C–SiC nanocrystals in the oxide

A. Pongrácz, G. Battistig, Cs. Dücső, K.V. Josepovits, P. Deák

Journal:

Materials Science and Engineering: C

Year:

2007

Language:

english

File:

PDF, 529 KB

english, 2007

23

X-ray photoelectron spectroscopy investigations of Si in non-stoichiometric SiNx LPCVD multilayered coatings

D.L. Wainstein, A.I. Kovalev, Cs. Ducso, T. Jaszi, P. Basa, Zs.J. Horvath, T. Lohner, P. Petrik

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2007

Language:

english

File:

PDF, 550 KB

english, 2007

24

Thermal response of microfilament heaters in gas sensing

I. Bársony, P. Fürjes, M. Ádám, Cs. Dücső, Zs. Vı́zváry, J. Zettner, F. Stam

Journal:

Sensors and Actuators B: Chemical

Year:

2004

Language:

english

File:

PDF, 175 KB

english, 2004

25

Thermal effects by the sensitive coating of calorimetric gas sensors

P. Fürjes, M. Ádám, Cs. Dücső, J. Zettner, I. Bársony

Journal:

Sensors and Actuators B: Chemical

Year:

2005

Language:

english

File:

PDF, 330 KB

english, 2005

26

Thermal characterisation of micro-hotplates used in sensor structures

P. Fürjes, Cs. Dücső, M. Ádám, J. Zettner, I. Bársony

Journal:

Superlattices and Microstructures

Year:

2004

Language:

english

File:

PDF, 2.51 MB

english, 2004

27

Thermal modelling of a porous silicon-based pellistor-type catalytic flammable gas sensor with two supporting beams

S.D Kolev, M Ádám, C Dücsö, I Bársony, C Cobianu, A van den Berg

Journal:

Microelectronics Journal

Year:

2000

Language:

english

File:

PDF, 168 KB

english, 2000

28

Electrical characterisation of Al/n–Si/p–Si Schottky junctions prepared by plasma immersion implantation

Zs.J. Horváth, M. Ádám, Cs. Dücsö, I. Pintér, Vo Van Tuyen, I. Bársony, E. Gombia, R. Mosca, Zs. Makaró

Journal:

Solid-State Electronics

Year:

1998

Language:

english

File:

PDF, 283 KB

english, 1998

29

Anomalous temperature dependence of series resistance in AgSi and AlSi Schottky junctions

Zs J Horváth, M Ádám, I Pintér, B Cvikl, D Korošak, T Mrdjen, Vo Van Tuyen, Zs Makaró, Cs Dücsö, I Bársony

Journal:

Year:

1998

Language:

english

File:

PDF, 197 KB

english, 1998

30

Small-angle neutron scattering in porous silicon

G. Kádár, G. Káli, Cs. Dücső, É.B. Vázsonyi

Journal:

Physica B: Condensed Matter

Year:

1997

Language:

english

File:

PDF, 139 KB

english, 1997

31

Explosion-proof monitoring of hydrocarbons by mechanically stabilised, integrable calorimetric microsensors

C. Dücso&amp, #x030B, , M. Ádám, P. Fürjes, M. Hirschfelder, S. Kulinyi, I. Bársony

Journal:

Sensors and Actuators B: Chemical

Year:

2003

Language:

english

File:

PDF, 262 KB

english, 2003

32

Porous silicon-based humidity sensor with interdigital electrodes and internal heaters

P. Fürjes, A. Kovács, Cs. Dücso&amp, #x030B, , M. Ádám, B. Müller, U. Mescheder

Journal:

Sensors and Actuators B: Chemical

Year:

2003

Language:

english

File:

PDF, 232 KB

english, 2003

33

Electrical and optical properties of Si-rich SiNx layers: Effect of annealing

P. Szöllősi, P. Basa, Cs. Dücső, B. Máté, M. Ádám, T. Lohner, P. Petrik, B. Pécz, L. Tóth, L. Dobos, L. Dózsa, Zs.J. Horváth

Journal:

Current Applied Physics

Year:

2006

Language:

english

File:

PDF, 99 KB

english, 2006

34

Porous silicon host matrix for deposition by atomic layer epitaxy

M Utriainen, S Lehto, L Niinistö, Cs Dücső, N.Q Khanh, Z.E Horváth, I Bársony, B Pécz

Journal:

Thin Solid Films

Year:

1997

Language:

english

File:

PDF, 406 KB

english, 1997

35

Ion beam analysis of plasma immersion implanted silicon for solar cell fabrication

N.Q. Khánh, I. Pintér, Cs. Dücső, M. Ádám, E. Szilágyi, I. Bársony, M.A. El-Sherbiny, J. Gyulai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1996

Language:

english

File:

PDF, 395 KB

english, 1996

36

A novel micro-structured reference material for microbeam analysis

Uwe Wätjen, Csaba Dücsö, Antonella Tajani, Frans Munnik, Frank Lechtenberg

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2000

Language:

english

File:

PDF, 1.50 MB

english, 2000

37

[IEEE 2013 19th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) - Berlin, Germany (2013.09.25-2013.09.27)] 19th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) - Optimisation of low dissipation micro-hotplates - Thermo-mechanical design and characterisation

Biro, Ferenc, Ducso, Csaba, Hajnal, Zoltan, Pap, Andrea Edit, Barsony, Istvan

Year:

2013

Language:

english

File:

PDF, 1.21 MB

english, 2013

38

Thermo-mechanical design and characterization of low dissipation micro-hotplates operated above 500°C

Biró, Ferenc, Dücső, Csaba, Hajnal, Zoltán, Riesz, Ferenc, Pap, Andrea Edit, Bársony, István

Journal:

Microelectronics Journal

Year:

2014

Language:

english

File:

PDF, 2.01 MB

english, 2014

39

Efficient catalytic combustion in integrated micropellistors

Bársony, I, Ádám, M, Fürjes, P, Lucklum, R, Hirschfelder, M, Kulinyi, S, Dücső, Cs

Journal:

Measurement Science and Technology

Year:

2009

Language:

english

File:

PDF, 2.70 MB

english, 2009

40

The effect of adhesion promoter layer thickness on the adhesion strength between silicone rubber and aluminium

BÁNHEGYI, GYÖRGY, DÜCSÖ, Csaba, Lohner, Tivadar

Journal:

Composite Interfaces

Year:

1997

Language:

english

File:

PDF, 3.02 MB

english, 1997

41

[IEEE 2007 13th International Workshop on Thermal Investigation of ICs and Systems (THERMINIC) - Budapest, Hungary (2007.09.17-2007.09.19)] 2007 13th International Workshop on Thermal Investigation of ICs and Systems (THERMINIC) - Micro-hotplates for thermal characterisation of structural materials of MEMS

Furjes, P., Csikvari, P., Barsony, I., Ducso, Cs.

Year:

2007

Language:

english

File:

PDF, 1.05 MB

english, 2007

42

[IEEE 26th International Spring Seminar on Electronics Technology: Integrated Management of Electronic Materials Production, 2003. - High Tatras, Slovakia (2003.05.11-2003.05.11)] 26th International Spring Seminar on Electronics Technology: Integrated Management of Electronic Materials Production, 2003. - Response of SnO/sub 2/ and ZnO adsorptive gas sensors on polluting gases

Fedak, V., Szasz, C., Ducso, C., Barsony, I., Kokenyesi, S.

Year:

2003

Language:

english

File:

PDF, 128 KB

english, 2003

43

[IEEE IEEE Sensors 2003 - Toronto, Ont., Canada (22-24 Oct. 2003)] Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) - Reliability of micromachined catalytic gas sensors

Norman, A., Stam, F., Ducso, C.

Year:

2003

Language:

english

File:

PDF, 445 KB

english, 2003

44

[IEEE 2006 5th IEEE Conference on Sensors - Daegu (2006.10.22-2006.10.25)] 2006 5th IEEE Conference on Sensors - Carbon Nanotubes - Towards Artificial Nose Implementation

Koos, A.A., Kertesz, K., Adam, M., Ducso, C., Horvath, Z.E., Biro, L.P., Barsony, I., Gyulai, J., Konya, Z., Kiricsi, I.

Year:

2006

Language:

english

File:

PDF, 855 KB

english, 2006

45

[IEEE IEEE Sensors, 2004. - Vienna, Austria (Oct. 24 - 27, 2004)] Proceedings of IEEE Sensors, 2004. - Three dimensional single crystalline force sensor by porous Si micromachining

Adam, M., Vazsonyi, E., Barsony, I., Vasarhelyi, G., Ducso, Cs.

Year:

2004

Language:

english

File:

PDF, 815 KB

english, 2004

46

[IEEE 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 - Maui, HI, USA (28-30 Oct. 2001)] Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516) - Porous silicon as multifunctional material in MEMS

Mescheder, U.M., Kovacs, A., Kronast, W., Barsony, I., Adam, M., Ducso, C.

Year:

2001

Language:

english

File:

PDF, 897 KB

english, 2001

47

[IEEE 2008 IEEE Sensors - Lecce, Italy (2008.10.26-2008.10.29)] 2008 IEEE Sensors - Integrated tactile system for dynamic 3D contact force mapping

Vasarhelyi, G., Adam, M., Ducso, Cs., Barsony, I., Kis, A.

Year:

2008

Language:

english

File:

PDF, 766 KB

english, 2008

48

Micro-pellistor with Integrated Porous Alumina Catalyst Support

Bíró, F., Pap, A.E., Bársony, I., Dücső, Cs.

Journal:

Procedia Engineering

Year:

2014

Language:

english

File:

PDF, 827 KB

english, 2014

49

Heavy Water in Gate Stack Processing

Pap, Andrea E., Dücső, Csaba, Kamarás, Katalin, Battistig, Gábor, Bársony, István

Journal:

Materials Science Forum

Year:

2008

Language:

english

File:

PDF, 809 KB

english, 2008

50

Fine-tuning of gas sensitivity by modification of nano-crystalline WO3 layer morphology

Takács, Máté, Dücső, Csaba, Pap, Andrea Edit

Journal:

Sensors and Actuators B: Chemical

Year:

2015

Language:

english

File:

PDF, 2.16 MB

english, 2015